| |
May 16, 2024
|
|
|
|
|
EE 7314 - Introduction to Microelectromechanical Systems
Credits: 3
Develops the basics for microelectromechanical devices and systems, including microactuators, microsensors, micromotors, principles of operation, different micromachining techniques (surface and bulk micromachining), IC-derived microfabrication techniques, and thin-film technologies as they apply to MEMS.
Add to Catalog (opens a new window)
|
|