May 20, 2024  
2017-2018 Undergraduate Catalog 
    
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2017-2018 Undergraduate Catalog [ARCHIVED CATALOG]

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EE 5314 - Introduction to Microelectromechanical Systems

Credits: 3

Develops the basics for MEMS, including microactuators, microsensors, and micromotors; principles of operation; micromachining techniques (surface and bulk micromachining), IC-derived microfabrication techniques; and thin lm technologies as they apply to MEMS. Prerequisite: EE 3311 .


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