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Apr 19, 2024
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ME 7314 - Introduction to Microelectromechanical Systems and Devices
Credits: 3
Develops the basics for microelectromechanical devices and systems, including microactuators, microsensors, micromotors, principles of operation, micromachining techniques (surface and bulk micromachining), IC-derived microfabrication techniques, and thin-film technologies as they apply to MEMS.
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