May 07, 2024  
2021-2022 Undergraduate Catalog 
    
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2021-2022 Undergraduate Catalog [ARCHIVED CATALOG]

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ME 5314 - Introduction to Microelectromechanical Systems and Devices

Credits: 3

Develops the basics for MEMS and devices, including microactuators, microsensors, and micromotors; principles of operation; micromachining techniques (surface and bulk micromachining); IC-derived microfabrication techniques; and thin lm technologies as they apply to MEMS.


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