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Mar 10, 2025
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ECE 7312 - Compound Semiconductor Devices and Processing
Credits: 3
Laboratory-oriented elective course for graduate and upper-level undergraduate students that provides in-depth coverage of InP- and GaAs-based device processing and silicon integrated circuit processing. Students without fabrication experience fabricate and characterize MOSFETs and semiconductor lasers. Students with some previous fabrication experience (such as ECE 3311) fabricate and test an advanced device mutually agreed upon by the student(s) and the instructor (e.g., HEMTs, HBTs, phase shifters, DBR lasers, grating-assisted directional couplers, and semiconductor lasers from developing materials such as GaInNAs). The governing equations of photolithography, oxidation, diffusion, ion-implantation, metallization, and etching are derived from fundamental concepts. Silicon process modeling uses the CAD tool SUPREM. Optical components are modeled using the SMU developed software WAVEGUIDE, GAIN, and GRATING. A laboratory report describing the projects is peer-reviewed before final submission. Prerequisite: ECE 3311 or equivalent.
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